Interpretation of Absolute Laser Reflectance During Optical Monitoring of Polycrystalline GaAs Deposition on Quartz Using Metalorganic Chemical Vapor Deposition

Clayton, Andrew J and Irvine, Stuart J (2011) Interpretation of Absolute Laser Reflectance During Optical Monitoring of Polycrystalline GaAs Deposition on Quartz Using Metalorganic Chemical Vapor Deposition.

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Abstract

Gallium arsenide was deposited by metal organic chemical vapor deposition in a horizontal quartz reactor tube using trimethylgallium and arsine at 400oC - 500oC. Nucleation time and deposition rate were monitored using in situ laser reflectometry. This allowed differentiation between film and parasitic growth, which was not possible with other optical techniques. An absolute reflectance model was developed using measurements prior to GaAs deposition, and then employed to calculate values for GaAs on quartz. Detected reflectance intensities during experimental GaAs deposition were low compared to the model due to 3-dimensional island growth, causing scattering of the incident laser radiation.

Item Type: Article
Additional Information: Copyright © 2011 IEEE. This material is posted here with permission of the IEEE and the author. Such permission of the IEEE does not in any way imply IEEE endorsement of any of the products or services of Glyndwr University Wrexham. Internal or personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution must be obtained from the IEEE by writing to mailto:pubs-permissions@ieee.org. By choosing to view this document, you agree to all provisions of the copyright laws protecting it. This is the author's final version after peer review. The published version can be assessed by following this link http://dx.doi.org/10.1007/s11664-011-1540-1 or at http://www.springerlink.com/content/f649815506316138/
Keywords: Real-time optical monitoring, GaAs, MOCVD
Members: Glyndŵr University
Depositing User: ULCC Admin
Date Deposited: 05 Oct 2011 09:13
Last Modified: 20 Mar 2016 21:19
URI: http://collections.crest.ac.uk/id/eprint/136

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